Extinction of RF capacitive low-pressure discharges
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Europhysics Letters (EPL)
سال: 2005
ISSN: 0295-5075,1286-4854
DOI: 10.1209/epl/i2005-10108-1